Improve deposition performance with Veco’s accurate and durable shadow masks
Shadow masks, also referred to as deposition masks or evaporation masks, are used in a wide range of vacuum-chamber evaporation and sputtering processes to fabricate both simple and complex micro-engineered electronic components and products. They are increasingly being used to deposit inks onto substrates during the manufacture of flat panel displays.
Veco supplies various deposition masks such as single masks, multi mask sets, and frame systems, depending on specific application. Multi-level masks can be produced with 'stepped' recesses, limiting the need for spacer sheets in multiple-sheet sets. Finished masks, produced in stainless steel and nickel with optional gold-plating, typically withstand post-deposition cleaning for up to 10 times longer than conventional masks.
Feature sizes | Down to +/-2 micron |
Tolerances | Sub micron level |
Alignment accuracy | Sub micron level |
Pitch | Down to 4 micron |
Materials | Stainless steel, hard or soft nickel |
Frames | Available on request |