MEMS probes

Veco’s the largest independent manufacturer of MEMS probes for front-end fabrication and wafer testing

MEMS probes

MEMS probes are used in front-end fabrication and wafer testing to determine the performance of electrical devices like integrated circuits and micro-electro-mechanical systems (MEMS) sensors.

With the world leading precision engineering technology Electroforming, Veco is the largest independent manufacturer of MEMS probes for front-end fabrication and wafer testing, providing the industry with innovative solutions with complex requirements. Electroformed vertical probes can be made with a highly stable contact resistance and excellent mechanical and electrical characteristics. Our state-of-the-art lithographic equipment allows for rapid, accurate, and economic tooling of thousands of probes in a single batch. Every single probe is carefully monitored to meet the most demanding quality standards and guarantee consistency of the products.

key features enabled by Electroforming

precision apertures
high precision with extreme feature accuracy
high precision metal parts with extreme feature accuracy down to ±1 μm can be made
superior mechanical and electrical stability
materials with superior mechanical and electrical stability, leading to longer lifetime and improved performance
co-development with design flexibility
with different processes of Electroforming, a variety of different types can be co-developed

technical specifications

Material: a variety of alloys possible
Thickness: 70-140 μm
Dimensions: 60 μm – several mm’s
Superior mechanical and electrical stability
Highly automated production with 100% inspection for highest quality
Multi-layer structure possible
co-develop with Veco
Talk to one of our engineers to learn about possibilities of our technology and how it can benefit your next-gen semicon testing solution
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